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Maskless fabrication of concave microlens arrays on silica glasses by a femtosecond-laser-enhanced local wet etching method
Wang, Xianhua, Hou, Cong, Bian, Hao, Liang, Weiwei, Si, Jinhai, Hou, Xun, Liu, Hewei, Yang, Qing, Chen, FengVolume:
18
Year:
2010
Language:
english
Journal:
oe/18/19/oe-18-19-20334.pdf
DOI:
10.1364/OE.18.020334
File:
PDF, 3.67 MB
english, 2010