Parametric smoothing model for visco-elastic polishing...

Optics Express 2010 Vol. 18; Iss. 21

Parametric smoothing model for visco-elastic polishing tools

Kim, Dae Wook, Park, Won Hyun, An, Hyun Kyoung, Burge, James H.
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Volume:
18
Year:
2010
Language:
english
Journal:
oe/18/21/oe-18-21-22515.pdf
DOI:
10.1364/OE.18.022515
File:
PDF, 1.25 MB
english, 2010
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