Impacts of cost functions on inverse lithography patterning
Yu, Jue-Chin, Yu, PeichenVolume:
18
Year:
2010
Language:
english
Journal:
oe/18/22/oe-18-22-23331.pdf
DOI:
10.1364/OE.18.023331
File:
PDF, 1.34 MB
english, 2010