Impacts of cost functions on inverse lithography patterning

Impacts of cost functions on inverse lithography patterning

Yu, Jue-Chin, Yu, Peichen
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Volume:
18
Year:
2010
Language:
english
Journal:
oe/18/22/oe-18-22-23331.pdf
DOI:
10.1364/OE.18.023331
File:
PDF, 1.34 MB
english, 2010
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