Very large spot size effect in nanosecond laser drilling efficiency of silicon
Brandi, Fernando, Burdet, Nicolas, Carzino, Riccardo, Diaspro, AlbertoVolume:
18
Year:
2010
Language:
english
Journal:
oe/18/22/oe-18-22-23488.pdf
DOI:
10.1364/OE.18.023488
File:
PDF, 1.06 MB
english, 2010