Quantitative determination of the charge carrier...

Optics Express 2010 Vol. 18; Iss. 25

Quantitative determination of the charge carrier concentration of ion implanted silicon by IR-near-field spectroscopy

Jacob, Rainer, Winnerl, Stephan, Schneider, Harald, Helm, Manfred, Wenzel, Marc Tobias, von Ribbeck, Hans-Georg, Eng, Lukas M., Kehr, Susanne C.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
18
Year:
2010
Language:
english
Journal:
oe/18/25/oe-18-25-26206.pdf
DOI:
10.1364/OE.18.026206
File:
PDF, 967 KB
english, 2010
Conversion to is in progress
Conversion to is failed