Optimized electron beam writing strategy for fabricating computer-generated holograms based on an effective medium approach
Freese, Wiebke, Kämpfe, Thomas, Rockstroh, Werner, Kley, Ernst-Bernhard, Tünnermann, AndreasVolume:
19
Year:
2011
Language:
english
Journal:
oe/19/9/oe-19-9-8684.pdf
DOI:
10.1364/OE.19.008684
File:
PDF, 1.05 MB
english, 2011