Two-dimensional displacement measurement by...

Optics Express 2011 Vol. 19; Iss. 10

Two-dimensional displacement measurement by quasi-common-optical-path heterodyne grating interferometer

Hsieh, Hung-Lin, Chen, Jyh-Chen, Lerondel, Gilles, Lee, Ju-Yi
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Volume:
19
Year:
2011
Language:
english
Journal:
oe/19/10/oe-19-10-9770.pdf
DOI:
10.1364/OE.19.009770
File:
PDF, 1.91 MB
english, 2011
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