THz emission characteristics from p/n junctions with metal lines under non-bias conditions for LSI failure analysis
Yamashita, Masatsugu, Otani, Chiko, Matsumoto, Toru, Midoh, Yoshihiro, Miura, Katsuyoshi, Nakamae, Koji, Nikawa, Kiyoshi, Kim, Sunmi, Murakami, Hironaru, Tonouchi, MasayoshiVolume:
19
Year:
2011
Language:
english
Journal:
oe/19/11/oe-19-11-10864.pdf
DOI:
10.1364/OE.19.010864
File:
PDF, 1.44 MB
english, 2011