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A 2-D MEMS scanning mirror based on dynamic mixed mode excitation of a piezoelectric PZT thin film S-shaped actuator
Koh, Kah How, Kobayashi, Takeshi, Lee, ChengkuoVolume:
19
Year:
2011
Language:
english
Journal:
oe/19/15/oe-19-15-13812.pdf
DOI:
10.1364/OE.19.013812
File:
PDF, 2.20 MB
english, 2011