Air-gap structure between integrated LiNbO_3 optical modulators and micromachined Si substrates
Takigawa, Ryo, Higurashi, Eiji, Suga, Tadatomo, Kawanishi, TetsuyaVolume:
19
Year:
2011
Language:
english
Journal:
oe/19/17/oe-19-17-15739.pdf
DOI:
10.1364/OE.19.015739
File:
PDF, 1.15 MB
english, 2011