![](/img/cover-not-exists.png)
Effect of separating layer thickness on W/Si multilayer replication
Wang, Fangfang, Mu, Baozhong, Jin, Huijun, Yang, Xiajun, Zhu, Jingtao, Wang, ZhanshanVolume:
19
Year:
2011
Language:
english
Journal:
oe/19/17/oe-19-17-15929.pdf
DOI:
10.1364/OE.19.015929
File:
PDF, 4.84 MB
english, 2011