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Snapshot phase sensitive scatterometry based on double-channel spectral carrier frequency concept
Magnusson, Robert, Cho, Yong Jai, Chegal, Won, Cho, Hyun Mo, Kim, Daesuk, Kim, HyunsukVolume:
19
Year:
2011
Language:
english
Journal:
oe/19/24/oe-19-24-23790.pdf
DOI:
10.1364/OE.19.023790
File:
PDF, 1.15 MB
english, 2011