Deconvolution of local surface response from topography in nanometer profilometry with a dual-scan method
Tsai, Chao-Wei, Lee, Chau-Hwang, Wang, JyhpyngVolume:
24
Year:
1999
Language:
english
Journal:
ol/24/23/ol-24-23-1732.pdf
DOI:
10.1364/OL.24.001732
File:
PDF, 351 KB
english, 1999