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Scalable interference lithography alignment for fabrication of three-dimensional photonic crystals
Feigel, A., Kotler, Z., Sfez, B.Volume:
27
Year:
2002
Language:
english
Journal:
ol/27/9/ol-27-9-746.pdf
DOI:
10.1364/OL.27.000746
File:
PDF, 142 KB
english, 2002