Measurement of phase differences between the diffracted orders of deep relief gratings
Cordeiro, C. M. B., Cescato, L., Freschi, A. A., Li, LifengVolume:
28
Year:
2003
Language:
english
Journal:
ol/28/9/ol-28-9-683.pdf
DOI:
10.1364/OL.28.000683
File:
PDF, 377 KB
english, 2003