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Photothermally enabled lithography for refractive-index modulation in SU-8 photoresist
Ong, Biow Hiem, Yuan, Xiaocong, Tao, Shaohua, Tjin, Swee ChuanVolume:
31
Year:
2006
Language:
english
Journal:
ol/31/10/ol-31-10-1367.pdf
DOI:
10.1364/OL.31.001367
File:
PDF, 247 KB
english, 2006