Extreme-ultraviolet spectral purity and magnetic ion debris mitigation by use of low-density tin targets
Harilal, S. S., Tillack, M. S., Tao, Y., O'Shay, B., Paguio, R., Nikroo, A.Volume:
31
Year:
2006
Language:
english
Journal:
ol/31/10/ol-31-10-1549.pdf
DOI:
10.1364/OL.31.001549
File:
PDF, 284 KB
english, 2006