Through-focus scanning-optical-microscope imaging method...

Optics Letters 2008 Vol. 33; Iss. 17

Through-focus scanning-optical-microscope imaging method for nanoscale dimensional analysis

Attota, Ravikiran, Germer, Thomas A., Silver, Richard M.
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Volume:
33
Year:
2008
Language:
english
Journal:
ol/33/17/ol-33-17-1990.pdf
DOI:
10.1364/OL.33.001990
File:
PDF, 305 KB
english, 2008
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