![](/img/cover-not-exists.png)
Vacuum-ultraviolet blazed silicon grating anisotropically etched by native-oxide mask
Sheng, Bin, Xu, Xiangdong, Liu, Ying, Hong, Yilin, Zhou, Hongjun, Huo, Tonglin, Fu, ShaojunVolume:
34
Year:
2009
Language:
english
Journal:
ol/34/8/ol-34-8-1147.pdf
DOI:
10.1364/OL.34.001147
File:
PDF, 292 KB
english, 2009