Integrated NiSi waveguide heaters for CMOS-compatible...

Optics Letters 2010 Vol. 35; Iss. 7

Integrated NiSi waveguide heaters for CMOS-compatible silicon thermo-optic devices

Van Campenhout, Joris, Green, William M. J., Assefa, Solomon, Vlasov, Yurii A.
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Volume:
35
Year:
2010
Language:
english
Journal:
ol/35/7/ol-35-7-1013.pdf
DOI:
10.1364/OL.35.001013
File:
PDF, 353 KB
english, 2010
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