Fabrication and characterization of high-quality-factor...

Optics Letters 2011 Vol. 36; Iss. 3

Fabrication and characterization of high-quality-factor silicon nitride nanobeam cavities

Deotare, Parag, Lončar, Marko, Khan, Mughees, Babinec, Thomas, McCutcheon, Murray W.
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Volume:
36
Year:
2011
Language:
english
Journal:
ol/36/3/ol-36-3-421.pdf
DOI:
10.1364/OL.36.000421
File:
PDF, 396 KB
english, 2011
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