Iridium/silicon multilayers for extreme ultraviolet...

Iridium/silicon multilayers for extreme ultraviolet applications in the 20–35 nm wavelength range

Zuppella, Paola, Monaco, Gianni, Corso, Alain Jody, Nicolosi, Piergiorgio, Windt, David L., Bello, Valentina, Mattei, Giovanni, Pelizzo, Maria Guglielmina
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Volume:
36
Year:
2011
Language:
english
Journal:
ol/36/7/ol-36-7-1203.pdf
DOI:
10.1364/OL.36.001203
File:
PDF, 408 KB
english, 2011
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