Iridium/silicon multilayers for extreme ultraviolet applications in the 20–35 nm wavelength range
Zuppella, Paola, Monaco, Gianni, Corso, Alain Jody, Nicolosi, Piergiorgio, Windt, David L., Bello, Valentina, Mattei, Giovanni, Pelizzo, Maria GuglielminaVolume:
36
Year:
2011
Language:
english
Journal:
ol/36/7/ol-36-7-1203.pdf
DOI:
10.1364/OL.36.001203
File:
PDF, 408 KB
english, 2011