Femtosecond laser delamination of thin transparent layers...

Femtosecond laser delamination of thin transparent layers from semiconducting substrates [Invited]

Rublack, Tino, Seifert, Gerhard
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Volume:
1
Year:
2011
Language:
english
Journal:
ome/1/4/ome-1-4-543.pdf
DOI:
10.1364/OME.1.000543
File:
PDF, 1.19 MB
english, 2011
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