Femtosecond laser delamination of thin transparent layers from semiconducting substrates [Invited]
Rublack, Tino, Seifert, GerhardVolume:
1
Year:
2011
Language:
english
Journal:
ome/1/4/ome-1-4-543.pdf
DOI:
10.1364/OME.1.000543
File:
PDF, 1.19 MB
english, 2011