Dynamic membrane projection lithography [Invited]
Burckel, D. Bruce, Wendt, Joel R., Brener, Igal, Sinclair, Michael B.Volume:
1
Year:
2011
Language:
english
Journal:
ome/1/5/ome-1-5-962.pdf
DOI:
10.1364/OME.1.000962
File:
PDF, 1.33 MB
english, 2011