Femtosecond-Laser-Assisted Microstructuring of Silicon...

Femtosecond-Laser-Assisted Microstructuring of Silicon Surfaces

Carey, James E., Crouch, Catherine H., Mazur, Eric
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Volume:
14
Year:
2003
Language:
english
Journal:
opn/14/2/opn-14-2-32.pdf
DOI:
10.1364/OPN.14.2.000032
File:
PDF, 395 KB
english, 2003
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