Ablation of Sub-100-nm Features with a Tabletop Soft X-ray Laser
Brizuela, F., Bravo, H., Berrill, M., Vaschenko, G., Longhon, B., Anderson, E. H., Chao, W., Attwood, D. T., Hemberg, O., Bloom, S.Volume:
18
Year:
2007
Language:
english
Journal:
opn/18/12/opn-18-12-45.pdf
DOI:
10.1364/OPN.18.12.000045
File:
PDF, 91 KB
english, 2007