Two-level BEOL processing for rapid iteration in MRAM...

IBM Journal of Research and Development 2006 Vol. 50; Iss. 1

Two-level BEOL processing for rapid iteration in MRAM development

Gaidis, M. C., O'Sullivan, E. J., Nowak, J. J., Lu, Y., Kanakasabapathy, S., Trouilloud, P. L., Worledge, D. C., Assefa, S., Milkove, K. R., Wright, G. P., Gallagher, W. J.
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Volume:
50
Year:
2006
Language:
english
Pages:
14
DOI:
10.1147/rd.501.0041
File:
PDF, 593 KB
english, 2006
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