Spatial resolution limits in electron-beam-induced...

Journal of Applied Physics 2005 Vol. 98; Iss. 8

Spatial resolution limits in electron-beam-induced deposition

Silvis-Cividjian, N., Hagen, C. W., Kruit, P.
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Volume:
98
Year:
2005
Language:
english
DOI:
10.1063/1.2085307
File:
PDF, 835 KB
english, 2005
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