Analysis of piezoresistance in p-type silicon for...

Journal of Microelectromechanical Systems 2002 Vol. 11; Iss. 5

Analysis of piezoresistance in p-type silicon for mechanical sensors

Toriyama, T., Sugiyama, S.
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Volume:
11
Year:
2002
Language:
english
Pages:
7
DOI:
10.1109/jmems.2002.802904
File:
PDF, 317 KB
english, 2002
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