[IEEE 19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul, Turkey (22-26 Jan. 2006)] 19th IEEE International Conference on Micro Electro Mechanical Systems - Temperature Compensation of a MEMS Resonator Using Quality Factor as a Thermometer
Hopcroft, M.A., Agarwal, M., Park, K.K., Kim, B., Jha, C.M., Candler, R.N., Yama, G., Murmann, B., Kenny, T.W.Year:
2006
Language:
english
Pages:
4
DOI:
10.1109/memsys.2006.1627776
File:
PDF, 731 KB
english, 2006