Reactive DC magnetron sputtered zirconium nitride (ZrN)...

Journal of Physics Conference Series 2008 Vol. 114

Reactive DC magnetron sputtered zirconium nitride (ZrN) thin film and its characterization

Subramanian, B, Ashok, K, Sanjeeviraja, C, Kuppusami, P, Jayachandran, M
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Volume:
114
Year:
2008
Language:
english
DOI:
10.1088/1742-6596/114/1/012039
File:
PDF, 992 KB
english, 2008
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