Measurement of contact placement errors in the van der Pauw...

Measurement of contact placement errors in the van der Pauw technique

Koon, Daniel W., Bahl, Arshad A., Duncan, Edward O.
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Volume:
60
Year:
1989
Language:
english
DOI:
10.1063/1.1140423
File:
PDF, 430 KB
english, 1989
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