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Evolution of Two-Dimensional Plasma Density on the E–H Heating-Mode Transition in Planar-Type Inductively Coupled Plasma
Lee, Hyo-Chang, Kim, Young-Cheol, Chung, Chin-WookVolume:
39
Year:
2011
Language:
english
Pages:
2
DOI:
10.1109/tps.2011.2135382
File:
PDF, 316 KB
english, 2011