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[IEEE 2010 International Conference on Microelectronic Test Structures (ICMTS) - Hiroshima, Japan (2010.03.22-2010.03.25)] 2010 International Conference on Microelectronic Test Structures (ICMTS) - A test structure for statistical evaluation of pn junction leakage current based on CMOS image sensor technology
Abe, Kenichi, Fujisawa, Takafumi, Suzuki, Hiroyoshi, Watabe, Shunichi, Kuroda, Rihito, Sugawa, Shigetoshi, Teramoto, Akinobu, Ohmi, TadahiroYear:
2010
Language:
english
Pages:
5
DOI:
10.1109/icmts.2010.5466868
File:
PDF, 221 KB
english, 2010