Silicon Nitride Nanosieve Membrane

Nano Letters 2004 Vol. 4; Iss. 2

Silicon Nitride Nanosieve Membrane

Gadgil, Vishwas J., Bostan, Cazimir G., Berenschot, Erwin, van Rijn, Cees J. M., Elwenspoek, Miko, Tong, Hien D., Jansen, Henri V.
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Volume:
4
Year:
2004
Language:
english
Pages:
5
DOI:
10.1021/nl0350175
File:
PDF, 209 KB
english, 2004
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