Sputtered flux distribution on the substrate in electron...

Sputtered flux distribution on the substrate in electron cyclotron resonance sputtering simulation and experimental study

Deenamma Vargheese, K., Mohan Rao, G.
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Volume:
87
Year:
2000
Language:
english
DOI:
10.1063/1.373021
File:
PDF, 379 KB
english, 2000
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