Proposal for Micromachined Accelerometer, Based on a Contactless Suspension With Zero Spring Constant
Poletkin, K.V., Chernomorsky, A.I., Shearwood, C.Volume:
12
Year:
2012
Language:
english
Pages:
1
DOI:
10.1109/jsen.2012.2188831
File:
PDF, 539 KB
english, 2012