[IEEE 2000 IEEE International Conference on Industrial Electronics, Control and Instrumentation - Nagoya, Japan (22-28 Oct. 2000)] 2000 26th Annual Conference of the IEEE Industrial Electronics Society. IECON 2000. 2000 IEEE International Conference on Industrial Electronics, Control and Instrumentation. 21st Century Technologies and Industrial Opportunities (Cat. No.00CH37141) - Reactive ion etching of CVD-diamond for sensor devices with a minimum feature size of 100 nm