Ta2O5/SiO2 multilayered thin film on Si as a proposed new...

Surface and Interface Analysis 1998 / 01 Vol. 26; Iss. 1

Ta2O5/SiO2 multilayered thin film on Si as a proposed new reference material for SIMS depth profiling

Kim, Kyung Joong, Moon, Dae Won
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Volume:
26
Language:
english
Pages:
8
Journal:
Surface and Interface Analysis
DOI:
10.1002/(sici)1096-9918(199801)26:13.0.co;2-i
Date:
January, 1998
File:
PDF, 406 KB
english, 1998
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