HTCVD growth of semi-insulating 4H-SiC crystals with low defect density
Ellison, A., Magnusson, B., Hemmingsson, C., Magnusson, W., Iakimov, T., Storasta, L., Henry, A., Henelius, N., Janzén, E.Volume:
640
Year:
2000
Language:
english
Pages:
1
DOI:
10.1557/proc-640-h1.2
File:
PDF, 4.73 MB
english, 2000