Combined experimental and modeling studies of microwave...

Journal of Applied Physics 2011 Vol. 109; Iss. 6

Combined experimental and modeling studies of microwave activated CH4/H2/Ar plasmas for microcrystalline, nanocrystalline, and ultrananocrystalline diamond deposition

Richley, James C., Fox, Oliver J. L., Ashfold, Michael N. R., Mankelevich, Yuri A.
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Volume:
109
Year:
2011
Language:
english
DOI:
10.1063/1.3562185
File:
PDF, 3.36 MB
english, 2011
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