Determination of the equivalent circuit of inductively...

Journal of Applied Physics 1999 Vol. 85; Iss. 3

Determination of the equivalent circuit of inductively coupled plasma sources

Colpo, Pascal, Ernst, Roland, Rossi, F.
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Volume:
85
Year:
1999
Language:
english
DOI:
10.1063/1.369268
File:
PDF, 352 KB
english, 1999
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