SPIE Proceedings [SPIE Optical Metrology - Munich, Germany (Monday 18 June 2007)] Modeling Aspects in Optical Metrology - Numerical simulation tool for synthetic speckle pattern images and their intensity-based integration under variable conditions for metrology applications
Riechert, Falko, Bastian, Georg, Lemmer, Uli, Bosse, Harald, Bodermann, Bernd, Silver, Richard M.Volume:
6617
Year:
2007
Language:
english
Pages:
1
DOI:
10.1117/12.726033
File:
PDF, 488 KB
english, 2007