Oxidation of molybdenum surfaces by reactive oxygen plasma...

Surface and Interface Analysis 1998 / 04 Vol. 26; Iss. 4

Oxidation of molybdenum surfaces by reactive oxygen plasma and O2+ bombardment: an auger and XPS study

López-Carreño, L. D., Benítez, G., Viscido, L., Heras, J. M., Yubero, F., Espinós, J. P., González-Elipe, A. R.
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Volume:
26
Language:
english
Pages:
7
Journal:
Surface and Interface Analysis
DOI:
10.1002/(sici)1096-9918(199804)26:43.0.co;2-a
Date:
April, 1998
File:
PDF, 403 KB
english, 1998
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