The ‘recycling trap’: a generalized explanation of...

The ‘recycling trap’: a generalized explanation of discharge runaway in high-power impulse magnetron sputtering

Anders, A, Čapek, J, Hála, M, Martinu, L
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Volume:
45
Year:
2012
Language:
english
DOI:
10.1088/0022-3727/45/1/012003
File:
PDF, 495 KB
english, 2012
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