![](/img/cover-not-exists.png)
The ‘recycling trap’: a generalized explanation of discharge runaway in high-power impulse magnetron sputtering
Anders, A, Čapek, J, Hála, M, Martinu, LVolume:
45
Year:
2012
Language:
english
DOI:
10.1088/0022-3727/45/1/012003
File:
PDF, 495 KB
english, 2012