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The Variation of Ohmic Contacts and Surface Characteristics on p-GaN Induced by Reactive Ion Etching
Chang, Kow-Ming, Cheng, Chao-Chen, Chu, Jiunn-YiVolume:
149
Year:
2002
Language:
english
Pages:
1
DOI:
10.1149/1.1479161
File:
PDF, 81 KB
english, 2002