Atomistic Simulation of Boron Diffusion with Charged Defects and Diffusivity in Strained Si/SiGe
Kim, Young-Kyu, Yoon, Kwan-Sun, Kim, Joong-Sik, Won, TaeyoungVolume:
7
Year:
2007
Language:
english
Pages:
5
DOI:
10.1166/jnn.2007.002
File:
PDF, 2.51 MB
english, 2007