Atomistic Simulation of Boron Diffusion with Charged...

Atomistic Simulation of Boron Diffusion with Charged Defects and Diffusivity in Strained Si/SiGe

Kim, Young-Kyu, Yoon, Kwan-Sun, Kim, Joong-Sik, Won, Taeyoung
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Volume:
7
Year:
2007
Language:
english
Pages:
5
DOI:
10.1166/jnn.2007.002
File:
PDF, 2.51 MB
english, 2007
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