Low resistance WSix-based ohmic contacts on n-type GaN

Journal of Applied Physics 2005 Vol. 98; Iss. 1

Low resistance WSix-based ohmic contacts on n-type GaN

Pan, Chang-Chi, Chen, Ming-Shung, Lee, Chia-Ming, Chyi, Jen-Inn
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Volume:
98
Year:
2005
Language:
english
DOI:
10.1063/1.1953863
File:
PDF, 421 KB
english, 2005
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