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Stress, strain, and microstructure in thin tungsten films deposited by dc magnetron sputtering
Vink, T. J., Walrave, W., Daams, J. L. C., Dirks, A. G., Somers, M. A. J., van den Aker, K. J. A.Volume:
74
Year:
1993
Language:
english
DOI:
10.1063/1.354842
File:
PDF, 1.29 MB
english, 1993