Stress, strain, and microstructure in thin tungsten films...

Stress, strain, and microstructure in thin tungsten films deposited by dc magnetron sputtering

Vink, T. J., Walrave, W., Daams, J. L. C., Dirks, A. G., Somers, M. A. J., van den Aker, K. J. A.

How much do you like this book?

What’s the quality of the file?

Download the book for quality assessment

What’s the quality of the downloaded files?

Volume:

Year:

1993

Language:

english

DOI:

10.1063/1.354842

File:

PDF, 1.29 MB

english, 1993

Conversion to is in progress

Conversion to is failed