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[IEEE 2011 International Conference on Microelectronic Test Structures (ICMTS) - Amsterdam, Netherlands (2011.04.4-2011.04.7)] 2011 IEEE ICMTS International Conference on Microelectronic Test Structures - Contact resistance measurement structures for high frequencies
Roy, Deepu, Pijper, Ralf M. T., Tiemeijer, Luuk F., Wolters, Rob A. M.Year:
2011
Language:
english
Pages:
6
DOI:
10.1109/icmts.2011.5976859
File:
PDF, 471 KB
english, 2011